PEEM
Photo Emission
E
lectron Microscopy

PEEM System

 


oval and chemical
defects on GaAs

integrated
circuit

YBaCuO
superconductor

passivated
InP

layer deposited
by ablation

chemical image
of InP

crystal phases
on YBaCuO

growth defect
on YBaCuO

test
pattern

large defect
on GaAs

stressed
GaAs

integrated
circuit